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Semiconductor Inspection Upright Metallographic Microscope INTJ-51D

INTJ-51D is a new lighting system and optical system of the study grade microscope RX series with uniform illumination and clear imaging. The breakthrough big gold camera frame design can load the 8-inch large working platform, with a stable and innovative mechanical structure to meet the professional market demand.
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  • INTJ-51D

  • CAIDAO

Upright semiconductor inspection microscope INTJ-51D

INTJ-51D is a new lighting system and optical system of the study grade microscope RX series with uniform illumination and clear imaging. The breakthrough big gold camera frame design can load the 8-inch large working platform, with a stable and innovative mechanical structure to meet the professional market demand.


1. Open-field observation (transmission)

5W High-power LED, equipped with N.A.0.5 Focus mirror, can penetrate the lighting, observe the LCD color LCD display, device frame edge, etc.

Transmission illumination and reflective illumination are independently controlled, which can be lit at the same time or separately.

INTJ-51D P2

LCD 10X(transmitted light)

2. Open-field observation (reflection)

The reflective lighting system, equipped with a newly designed infinite flat field achromatic long working distance metallographic objective lens, can get clear, flat and bright high picture quality micro images from low to high times.

INTJ-51D P3


Integrated circuit 5X open field

INTJ-51D P4

Integrated circuit 100X open field


3.Simple polarizing observation

INTJ-51D P6

PCB cross-section in 20X polarized light


Insert the starting mirror and the mirror plug panel into the lighting position and make a simple polarized observation.The microscope can be divided into fixed and 360° rotating two types.

INTJ-51D P7

FPC 10X Dark Field observation

By pulling the dark field lighting pull rod to the specified position, the dark field function can be used to observe various scratches, impurities and other subtle defects on the surface of the object. The dark field function is limited to INTJ-51D model.


4. DIC differential interference observations

On the basis of orthogonal polarizing, DIC can be inserted by DIC differential interference prism.Using DIC technology, the small difference of the objective lens surface can produce obvious relief effect, and greatly improve the contrast of the image.

5X, 10X and 20X are specially designed for DIC, which makes the interference of the whole field of view consistent. The differential interference effect is very excellent, and the DIC effect of high-power objective lens is also perfect.

INTJ-51D P8

Conductive particles 20X DIC

INTJ-51D P9

Wafer 50X DIC



Semiconductor inspection Microscope INTJ-51D

Overall dimension

INTJ-51D P10

Semiconductor inspection Microscope, INTJ-51D

Technical specifications

Optical system

Unite distant chromatic difference optical system

Observation method

Open field / dark field / polarized / DIC

Observing tube

30° tilt, like, infinite hinge three-pass observation tube, Tong Tong adjustment: 50-76mm, separation ratio: 100:0 or 0:100

30° tilt, inverted image, infinite hinge three-pass observation head, find Tong distance adjustment range 50-76mm, three gear type light separation ratio: 0:100 or 20:80 or 100:0

Eyepiece

High eye point, large visual field flat field eyepiece PL10X / 25mm, adjustable vision, with a single scale cross marking board

High eye point large visual field flat field eye mirror PL10X/26.5mm, adjustable vision, with a single scale cross marking board

Objective

Gold objective (5X, 10X, 20X, 50X, 100X)

Infinity long open-field objective (5X, 10X, 20X, 50X, 100X)

Changer

Light field five-hole converter with DIC slot

Open-field six-hole converter with DIC slot

Open field seven-hole converter, with DIC slot

The focus mechanism

Reflecting frame, front low hand position coarse micro coaxial focus mechanism.Crude adjustment stroke 33mm, fine tuning precision 0.001mm; with sliding adjustment tightening device and random upper limit device; built-in 100-240V wide voltage system, with brightness setting dark twist and reset twist

Light field reflector with variable aperture, field aperture, adjustable center; light field lighting switching device; color filter slot and polarizer slot

Objective table

8-inch three-layer mechanical movement platform with low hand X and Y; 525mmx330mm, movement range: 210mmx210mm; with clutch handle for rapid movement in full travel range; glass platform (for reflection)

Reflective lighting system

Light field reflector with variable aperture, field aperture, adjustable center; light field lighting switching device; color filter slot and polarizer slot

Photography and vedio recording

0.5X/0.65X/1X camera receiver, C-type interface, adjustable focus

Other

Starting mirror plug, fixed mirror insert, 360° rotating mirror plug; DIC differential interference component; interference filter group for reflection; high precision micrometer


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