Caidao independently developed and completed the first 12-inch industrial wafer atomic force microscope in China

Caidao Precision is the first company in China to fully layout the "precision ultra-precision industrial microscopic equipment", mainly focusing on the semiconductor and pan-semiconductor industries. At the beginning of 2019, Caidao actively layout in the field of semiconductor measuring equipment, and welcome the arrival of the opportunity of advanced semiconductor large silicon wafer production capacity expansion in China.

Atomic force microscope is one of the three major microscopic tools

Atomic force microscope is one of the three major microscopic tools (optical, electron and atomic force microscope). It was introduced in the 1880s and is the microscopic tool with the highest three-dimensional imaging and microscopic precision. At present, the suppliers of atomic force microscopes are mainly foreign brand manufacturers, and the foreign brand manufacturers are mainly the scientific research equipment of small samples, and few manufacturers can provide large sample wafer level atomic force microscopes.

After more than three years of efforts, in March 2023, Caidao launched the domestic "industrial end" 12-inch wafer level atomic microscope (nano microscope), to fill the gap in the domestic industry. 

This equipment is one of the indispensable equipment for the roughness and key size measurement of semiconductor materials and devices, especially in the field of semiconductor advanced process below 28 nm, the supply of domestic measuring equipment is almost blank. The introduction of a 12-inch wafer level atomic force microscope is of great significance to the semiconductor equipment industry.

The 12-inch wafer-level atomic force microscope is accurate at the nanolevel.

The 12-inch wafer-level atomic force microscope is accurate at the nanolevel, with the XY axis reaching 0.3nm and the Z axis reaching 0.035nm. The scanning speed is greatly improved, with each image scanning speed at 20-50 seconds, much higher than the usual 5-8 minutes per scan speed. The device also has many advantages, such as one-button opening, automatic tablet change, automatic needle entry, and dual-screen display.

The successful development of the atomic force microscope has enabled the Caidao precision microscopy detection equipment to complete the complete layout from micron, submicron, to nano. The company's original detection and measuring equipment, through the integration, the detection accuracy can be improved to the nanometer level.

Combined with the company's ability to research and develop production automation equipment, the company will provide production line automation solutions according to the testing requirements of wafer foundry and production line yield.